157-nm Single-Layer Resists Based on Main-Chain-Fluorinated Polymers
Irie, Shigeo, Ishikawa, Seiichi, Hagiwara, Takuya, Yamazaki, Tamio, Furukawa, Takamitsu, Itani, Toshiro, Kawaguchi, Yasuhide, Kodama, Syun-ichi, Yokokoji, Osamu, Kaneko, Isamu, Takebe, Yoko, Okada, ShТом:
42
Мова:
english
Журнал:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.3743
Date:
June, 2003
Файл:
PDF, 400 KB
english, 2003
File converter
Більше результатів пошуку
More benefits 
