Positive Charge Generation at a S i O 2 / S i Interface due to Bombardment with Metastable Atoms
Ono, Tetsuo, Itabashi, Naoshi, Ochiai, Isao, Yamamoto, Seiji, Mochiji, KozouТом:
36
Журнал:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.6718
Date:
November, 1997
Файл:
PDF, 752 KB
1997