Nano-Crystalline Diamond Films Grown by Radio-Frequency Inductively Coupled Plasma Jet Enhanced Chemical Vapor Deposition
Shi, Yan-Chao, Li, Jia-Jun, Liu, Hao, Zuo, Yong-Gang, Bai, Yang, Sun, Zhan-Feng, Ma, Dian-Li, Chen, Guang-ChaoТом:
32
Мова:
english
Журнал:
Chinese Physics Letters
DOI:
10.1088/0256-307X/32/8/088104
Date:
August, 2015
Файл:
PDF, 1.02 MB
english, 2015