A study on a silicon Hall effect device with an integrated electroplated planar coil for magnetic sensing applications
Gamage, Sisira K, Henderson, H ThurmanТом:
16
Мова:
english
Журнал:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/3/003
Date:
March, 2006
Файл:
PDF, 311 KB
english, 2006
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