Laser Micromachining and Characterization of Metal-on-Glass High Density Pitch Adapters
Perez, Eliseo, Rey-Garcia, Francisco, Bao-Varela, Carmen, de la Fuente, German F., Dosil, Alvaro, Gallas, Abraham A., Rodriguez, PabloТом:
24
Мова:
english
Журнал:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2413051
Date:
October, 2015
Файл:
PDF, 3.00 MB
english, 2015