SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, USA (Saturday 2 February 2013)] Optoelectronic Interconnects XIII - Vertically integrated double-layer on-chip crystalline silicon nanomembranes based on adhesive bonding
Zhang, Yang, Kwong, David, Xu, Xiaochuan, Hosseini, Amir, Yang, Sang Y., Rogers, John A., Chen, Ray T., Glebov, Alexei L., Chen, Ray T.Том:
8630
Рік:
2013
Мова:
english
DOI:
10.1117/12.2005440
Файл:
PDF, 1.46 MB
english, 2013