[IEEE 2015 IEEE Conference on Control Applications (CCA) - Sydney, Australia (2015.9.21-2015.9.23)] 2015 IEEE Conference on Control Applications (CCA) - Design and control of a MEMS nanopositioner with bulk piezoresistive sensors
Maroufi, Mohammad, Yong, Y. K., Moheimani, S. O. RezaРік:
2015
Мова:
english
DOI:
10.1109/CCA.2015.7320816
Файл:
PDF, 1.34 MB
english, 2015