Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition
Jõgiaas, Taivo, Zabels, Roberts, Tamm, Aile, Merisalu, Maido, Hussainova, Irina, Heikkilä, Mikko, Mändar, Hugo, Kukli, Kaupo, Ritala, Mikko, Leskelä, MarkkuТом:
282
Мова:
english
Журнал:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2015.10.008
Date:
November, 2015
Файл:
PDF, 1.48 MB
english, 2015
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