SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and Nanofabrication - San Jose, CA (Saturday 19 January 2008)] MEMS Adaptive Optics II - Characterizing MEMS deformable mirrors for open-loop operation: high-resolution measurements of thin-plate behavior
Morzinski, Katie M., Olivier, Scot S., Bifano, Thomas G., Gavel, Donald T., Norton, Andrew P., Kubby, Joel A., Dillon, Daren R., Reinig, Marco R.Том:
6888
Рік:
2008
Мова:
english
DOI:
10.1117/12.773555
Файл:
PDF, 1.13 MB
english, 2008