SPIE Proceedings [SPIE AeroSense '97 - Orlando, FL (Monday 21 April 1997)] Navigation and Control Technologies for Unmanned Systems II - Finite element modeling and simulation on a novel microstructure silicon accelerometer with direct frequency output
Fan, Shangchun, Liu, Guangyu, Lee, Man Hyung, Speigle, Scott A.Том:
3087
Рік:
1997
Мова:
english
DOI:
10.1117/12.277220
Файл:
PDF, 606 KB
english, 1997