SPIE Proceedings [SPIE High-Power Laser Ablation 2004 - Taos, NM (Sunday 25 April 2004)] High-Power Laser Ablation V - Laser doping for microelectronics and microtechnology
Sarnet, Thierry, Kerrien, Gurwan, Yaakoubi, Nourdin, Bosseboeuf, Alain, Dufour-Gergam, Elisabeth, Debarre, Dominique, Boulmer, Jacques, Kakushima, Kuniyuki, Laviron, Cyrille, Hernandez, Miguel, VenturТом:
5448
Рік:
2004
Мова:
english
DOI:
10.1117/12.547759
Файл:
PDF, 981 KB
english, 2004