SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Optical Measurement Systems for Industrial Inspection IX - Uncertainty reduction of light spot angular position estimation in optical measurement system based on quadrant photodiode
Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Lebedko, Evgeny G., Trifonov, Kirill V.Том:
9525
Рік:
2015
Мова:
english
DOI:
10.1117/12.2184623
Файл:
PDF, 351 KB
english, 2015
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