SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] Micromachining and Microfabrication Process Technology XIX - Calibrating bimetallic grayscale photomasks to photoresist response for precise micro-optics fabrication
Maher, Mary Ann, Resnick, Paul J., Chapman, Glenn H., Qarehbaghi, Reza, Roche, SantiagoТом:
8973
Рік:
2014
Мова:
english
DOI:
10.1117/12.2041429
Файл:
PDF, 2.49 MB
english, 2014