[IEEE 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Wien, Vienna, Austria (2016.1.25-2016.1.27)] 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Robust EOT and effective work function extraction for 14 nm node FDSOI technology
Mohamad, B., Leroux, C., Rideau, D., Haond, M., Reimbold, G., Ghibaudo, G.Рік:
2016
Мова:
english
DOI:
10.1109/ulis.2016.7440071
Файл:
PDF, 560 KB
english, 2016