SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Micromachining Technology for Micro-Optics and Nano-Optics II - Fabrication of passively aligned micro-optics using focused ion beam
Mohammed, Waleed S., Johnson, Eric G., Johnson, Eric G., Nordin, Gregory P.Том:
5347
Рік:
2003
Мова:
english
DOI:
10.1117/12.522067
Файл:
PDF, 183 KB
english, 2003