SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] Optical Micro- and Nanometrology in Microsystems Technology - Digital in-line holography for dynamic micrometrology
Singh, Vijay Raj, Gorecki, Christophe, Asundi, Anand K., Hedge, Gopalkrishna, Asundi, Anand Krishna, Osten, WolfgangТом:
6188
Рік:
2006
Мова:
english
DOI:
10.1117/12.664812
Файл:
PDF, 2.17 MB
english, 2006