SPIE Proceedings [SPIE International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - St. Petersburg, Russia (Monday 8 June 1998)] International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - Radiation-stimulated processes in Si surface layers
Jacobs, Patrick W. M., Kiv, Arnold E., Soloviev, Vladimir N., Maximova, Tatiana N., Chislov, Valery V., Melker, Alexander I.Том:
3687
Рік:
1999
Мова:
english
DOI:
10.1117/12.347417
Файл:
PDF, 273 KB
english, 1999