Effects of Titanium Layer Oxygen Scavenging on the High-k/InGaAs Interface
Winter, Roy, Shekhter, Pini, Tang, Kechao, Floreano, Luca, Verdini, Alberto, McIntyre, Paul C, Eizenberg, MosheМова:
english
Журнал:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.6b02957
Date:
June, 2016
Файл:
PDF, 1.39 MB
english, 2016