SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining and Microfabrication Process Technology X - Vibrating RF MEMS overview: applications to wireless communications
Nguyen, Clark T., Maher, Mary-Ann, Stewart, Harold D.Том:
5715
Рік:
2005
Мова:
english
DOI:
10.1117/12.608015
Файл:
PDF, 1.18 MB
english, 2005