SPIE Proceedings [SPIE Symposium on Applied Photonics - Glasgow, United Kingdom (Sunday 21 May 2000)] Micro-Opto-Electro-Mechanical Systems - Microfabrication and packaging of deformable mirror devices
Ross, Alan W., Graham, Stephen C., Gundlach, Alan M., Stevenson, J. Tom M., Hossack, William J., Vass, David G., Bodammer, Georg K., Smith, Euan, Ward, Kevin, Syms, Richard R. A.Том:
4075
Рік:
2000
Мова:
english
DOI:
10.1117/12.397934
Файл:
PDF, 2.41 MB
english, 2000