SPIE Proceedings [SPIE Microelectronic Manufacturing '99 - Santa Clara, CA (Wednesday 22 September 1999)] Multilevel Interconnect Technology III - Lithographic CD variation in contact, via, local interconnect, and damascene levels
Trouiller, Yorick, Didiergeorges, Anne, Fanget, Gilles L., Laviron, Cyrille, Comboroure, Corinne, Quere, Yves, Graef, Mart, Patel, Divyesh N.Том:
3883
Рік:
1999
Мова:
english
DOI:
10.1117/12.360577
Файл:
PDF, 707 KB
english, 1999
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