SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Recent Developments in Traceable Dimensional Measurements III - Calibration of two-dimensional nanometer gratings using optical diffractometer and metrological atomic force microscope
Kim, Jong-Ahn, Decker, Jennifer E., Peng, Gwo-Sheng, Kim, Jae Wan, Park, Byong Chon, Eom, Tae Bong, Kang, Chu-ShikТом:
5879
Рік:
2005
Мова:
english
DOI:
10.1117/12.614786
Файл:
PDF, 234 KB
english, 2005
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