SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 16 April 2012)] Optical Micro- and Nanometrology IV - Wafer-scale nondestructive metrology on subwavelength diffraction gratings by means of Wood's anomaly
Vandermeiren, W., Stiens, J., De Tandt, C., Ranson, W., Shkerdin, G., Vounckx, R., Gorecki, Christophe, Asundi, Anand K., Osten, WolfgangТом:
8430
Рік:
2012
Мова:
english
DOI:
10.1117/12.922517
Файл:
PDF, 1022 KB
english, 2012