Sensitivity and temperature behavior of a novel z -axis differential resonant micro accelerometer
Comi, C, Corigliano, A, Langfelder, G, Zega, V, Zerbini, SТом:
26
Мова:
english
Журнал:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/3/035006
Date:
March, 2016
Файл:
PDF, 2.08 MB
english, 2016