[IEEE 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2016.5.16-2016.5.19)] 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Management of crisis situations in a large unified AMHS of a semiconductor manufacturing facility: IE: Industrial engineering
Ndiaye, Moulaye Aidara, Dauzere-Peres, Stephane, Yugma, Claude, Rulliere, Lionel, Lamiable, GillesРік:
2016
Мова:
english
DOI:
10.1109/asmc.2016.7491112
Файл:
PDF, 481 KB
english, 2016