Properties of near-surface layer of 64 Zn + ion hot-implanted Si
Privezentsev, Vladimir, Kulikauskas, Vaclav, Steinman, Eduard, Tereshchenko, Alexey, Bazhenov, Anatoly, Tabachkova, Nataliya, Batrakov, AlexanderТом:
12
Мова:
english
Журнал:
physica status solidi (c)
DOI:
10.1002/pssc.201400234
Date:
August, 2015
Файл:
PDF, 477 KB
english, 2015