SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Miniaturized Systems with Micro-Optics and Micromechanics II - Strength of indium-phosphide-based microstructures
Greek, Staffan, Hjort, Klas, Schweitz, Jan-Ake, Seassal, Christian, Leclercq, Jean Louis, Gendry, Michel, Besland, Marie-Paule, Viktorovitch, Pierre, Figuet, C., Souliere, V., Monteil, Y., Motamedi, MТом:
3008
Рік:
1997
Мова:
english
DOI:
10.1117/12.271420
Файл:
PDF, 526 KB
english, 1997