SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Photonics: Design, Technology, and Packaging - Limitations of proximity-effect correction for electron-beam patterning of photonic crystals
Wuest, Robert, Jagadish, Chennupati, Choquette, Kent D., Hunziker, Christoph, Robin, Franck, Eggleton, Benjamin J., Nener, Brett D., Strasser, Patric, Erni, Daniel, Nugent, Keith A., Jackel, HeinzТом:
5277
Рік:
2003
Мова:
english
DOI:
10.1117/12.522316
Файл:
PDF, 1.22 MB
english, 2003
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