SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Cannes-Mandelieu, France (Tuesday 19 March 2002)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Efficient and reliable design of microsystems
Peters, Dagmar, Rehfuss, Sven, Bolte, Hilmar, Nuessen, Oliver, Laur, Rainer, Courtois, Bernard, Karam, Jean Michel, Markus, Karen W., Michel, Bernd, Mukherjee, Tamal, Walker, James A.Том:
4755
Рік:
2002
Мова:
english
DOI:
10.1117/12.462819
Файл:
PDF, 422 KB
english, 2002
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