Influence of negative bias pulse parameters on accumulation of macroparticles on the substrate immersed in titanium vacuum arc plasma
Ryabchikov, Alexander I., Ananin, Peter S., Sivin, Denis O., Dektyarev, Sergey V., Bumagina, Anna I., Shevelev, Alexey E., Andriyashin, Dmitry A.Мова:
english
Журнал:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.06.026
Date:
June, 2016
Файл:
PDF, 2.06 MB
english, 2016