SPIE Proceedings [SPIE Lasers, Optics, and Vision for Productivity in Manufacturing I - Besancon, France (Monday 10 June 1996)] Optical Inspection and Micromeasurements - High-reflectivity surface evaluation in Fizeau phase-stepping interferometry with a Ronchi grid as phase modulator
Dorrio, Benito V., Bugarin, J., Alen, Jose M., Fernandez, Antonio, Doval, Angel F., Lopez Vazquez, Jose Carlos, Blanco-Garcia, Jesus, Fernandez, J. L., Perez-Amor, Mariano, Gorecki, ChristopheТом:
2782
Рік:
1996
Мова:
english
DOI:
10.1117/12.250752
Файл:
PDF, 705 KB
english, 1996
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