Influence of power and temperature on properties of sputtered AZO films
Patel, Kartik H., Rawal, Sushant K.Мова:
english
Журнал:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.08.073
Date:
September, 2016
Файл:
PDF, 1.79 MB
english, 2016