Circular membrane approximation model with the effect of the finiteness of the electrode’s diameter of MEMS capacitive micromachined ultrasonic transducers
Maity, Reshmi, Maity, Niladri Pratap, Baishya, SrimantaМова:
english
Журнал:
Microsystem Technologies
DOI:
10.1007/s00542-016-3184-9
Date:
November, 2016
Файл:
PDF, 1.09 MB
english, 2016