Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 03 Vol. 35; Iss. 2
Extraction of the characteristics of current-limiting elements from field emission measurement data
Bachmann, Michael, Dams, Florian, Düsberg, Felix, Hofmann, Martin, Pahlke, Andreas, Langer, Christoph, Ławrowski, Robert, Prommesberger, Christian, Schreiner, Rupert, Serbun, Pavel, Lützenkirchen-HechТом:
35
Мова:
english
Журнал:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4971768
Date:
March, 2017
Файл:
PDF, 1.20 MB
english, 2017
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