Material and optical properties of low-temperature NH 3 -free PECVD SiN x layers for photonic applications
Domínguez Bucio, Thalía, Khokhar, Ali Z, Lacava, Cosimo, Stankovic, Stevan, Mashanovich, Goran Z, Petropoulos, Periklis, Gardes, Frederic YТом:
50
Мова:
english
Журнал:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/50/2/025106
Date:
January, 2017
Файл:
PDF, 2.39 MB
english, 2017