Spatial profiles of electron density, electron temperature, average ionic charge, and EUV emission of laser-produced Sn plasmas for EUV lithography
Sato, Yuta, Tomita, Kentaro, Tsukiyama, Syoichi, Eguchi, Toshiaki, Uchino, Kiichiro, Kouge, Kouichiro, Tomuro, Hiroaki, Yanagida, Tatsuya, Wada, Yasunori, Kunishima, Masahito, Kodama, Takeshi, MizogucТом:
56
Мова:
english
Журнал:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.036201
Date:
March, 2017
Файл:
PDF, 1.37 MB
english, 2017
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