SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2016 - Zvenigorod, Russian Federation (Monday 3 October 2016)] International Conference on Micro- and Nano-Electronics 2016 - Elements for hard X-ray optics produced by cryogenic plasma etching of silicon
Lukichev, Vladimir F., Rudenko, Konstantin V., Miakonkikh, Andrey V., Rogozhin, Alexander E., Rudenko, Konstantin V., Lukichev, Vladimir F., Yunkin, Vyacheslav A., Snigirev, Anatoly A.Том:
10224
Рік:
2016
Мова:
english
DOI:
10.1117/12.2266471
Файл:
PDF, 398 KB
english, 2016
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