AIP Conference Proceedings [Author(s) INTERNATIONAL CONFERENCE ON NANO-ELECTRONIC TECHNOLOGY DEVICES AND MATERIALS 2015 (IC-NET 2015) - Selangor, Malaysia (27 February–2 March 2015)] - Optimization of time on CF4/O2 etchant for inductive couple plasma reactive ion etching of TiO2 thin film
Adzhri, R., Arshad, M. K. Md., Fathil, M. F. M., Hashim, U., Ruslinda, A. R., Ayub, R. M., Gopinath, Subash C. B., Voon, C. H., Foo, K. L., N., M. Nuzaihan M., Azman, A. H., Zaki, M.Том:
1733
Рік:
2016
Мова:
english
DOI:
10.1063/1.4948887
Файл:
PDF, 727 KB
english, 2016