Frequency-tuning radiofrequency plasma source operated in inductively-coupled mode under a low magnetic field
Takahashi, Kazunori, Nakano, Yudai, Ando, AkiraТом:
50
Мова:
english
Журнал:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aa7524
Date:
July, 2017
Файл:
PDF, 932 KB
english, 2017