[IEEE 2016 IEEE International Conference on Plasma Science (ICOPS) - Banff, AB, Canada (2016.6.19-2016.6.23)] 2016 IEEE International Conference on Plasma Science (ICOPS) - A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in technological RF plasmas
Daksha, Manaswi, Berger, Birk, Schuengel, Edmund, Koepke, Mark, Schulze, Julian, Korolov, Ihor, Derzsi, Aranka, Donko, ZoltanРік:
2016
Мова:
english
DOI:
10.1109/plasma.2016.7534337
Файл:
PDF, 100 KB
english, 2016
File converter
Більше результатів пошуку
More benefits 
