Fabrication of Diamond-Like Carbon Microgears in Room-Temperature Curing Nanoimprint Lithography Using Ladder-Type Hydrogen Silsesquioxane
Kiyohara, Shuji, Shimizu, Yuto, Ishikawa, Ippei, Harigai, Toru, Takikawa, Hirofumi, Watanabe, Masahiko, Sugiyama, Yoshinari, Omata, Yukiko, Kurashima, YuichiТом:
1
Рік:
2016
Мова:
english
Журнал:
MRS Advances
DOI:
10.1557/adv.2016.126
Файл:
PDF, 722 KB
english, 2016