Design and testing of a compact non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings
Shimizu, Yuki, Aihara, Ryo, Mano, Kazuki, Chen, Chong, Chen, Yuan-Liu, Chen, Xiuguo, Gao, WeiМова:
english
Журнал:
Precision Engineering
DOI:
10.1016/j.precisioneng.2017.12.004
Date:
December, 2017
Файл:
PDF, 971 KB
english, 2017
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