[IEEE 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Los Angeles, CA, USA (2017.4.9-2017.4.12)] 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - A novel piezoresistive sensitive structure for micromachined high-pressure sensors
Guo, Xin, Hebibul, Rahman, Jiang, Zhuangde, Zhao, Libo, Xu, Tingzhong, Zhao, Zhiming, Li, Zhikang, Xu, Yu, Gao, WendiРік:
2017
Мова:
english
DOI:
10.1109/nems.2017.8017123
Файл:
PDF, 598 KB
english, 2017
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