Impact of sublayer thickness and annealing on silicon nanostructures formation in a -Si:H/ a -SiN x :H superlattices for photovoltaics
Calta, Pavel, Šutta, Pavol, Medlín, Rostislav, Netrvalová, MarieМова:
english
Журнал:
Vacuum
DOI:
10.1016/j.vacuum.2018.04.009
Date:
April, 2018
Файл:
PDF, 7.85 MB
english, 2018