AIP Conference Proceedings [Author(s) PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS WITH HIERARCHICAL STRUCTURE FOR NEW TECHNOLOGIES AND RELIABLE STRUCTURES 2017 (AMHS’17) - Tomsk, Russia (9–13 October 2017)] - Degradation of nitride coatings in low-pressure gas discharge plasma
Ivanov, Yurii, Shugurov, Vladimir, Krysina, Olga, Petrikova, Elizaveta, Tolkachev, OlegТом:
1909
Рік:
2017
Мова:
english
DOI:
10.1063/1.5013755
Файл:
PDF, 2.08 MB
english, 2017