ChemInform Abstract: CONCENTRATION, SOLUBILITY, AND EQUILIBRIUM DISTRIBUTION COEFFICIENT OF NITROGEN AND OXYGEN IN SEMICONDUCTOR SILICON
YATSURUGI, Y., AKIYAMA, N., ENDO, Y., NOZAKI, T.Том:
4
Журнал:
Chemischer Informationsdienst
DOI:
10.1002/chin.197340062
Date:
October, 1973
Файл:
PDF, 101 KB
1973