A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects
Savov, Angel, Joshi, Shivani, Shafqat, Salman, Hoefnagels, Johan, Louwerse, Marcus, Stoute, Ronald, Dekker, RonaldТом:
9
Мова:
english
Журнал:
Micromachines
DOI:
10.3390/mi9010039
Date:
January, 2018
Файл:
PDF, 11.55 MB
english, 2018