[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement
Gando, Ryunosuke, Maeda, Shunta, Masunishi, Kei, Tomizawa, Yasushi, Ogawa, Etsuji, Hatakeyama, Yohei, Itakura, Tetsuro, Ikehashi, TamioРік:
2018
Мова:
english
DOI:
10.1109/MEMSYS.2018.8346713
Файл:
PDF, 537 KB
english, 2018
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