[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Inline relative permittivity sensing using silicon electrodes realized in surface channel technology
Alveringh, Dennis, Wiegerink, Remco J., Lotters, Joost C.Рік:
2018
Мова:
english
DOI:
10.1109/MEMSYS.2018.8346686
Файл:
PDF, 1.65 MB
english, 2018