One-Dimensional Control System for a Linear Motor of a Two-Dimensional Nanopositioning Stage Using Commercial Control Hardware
Díaz Pérez, Lucía, Torralba Gracia, Marta, Albajez García, José, Yagüe Fabra, JoséТом:
9
Журнал:
Micromachines
DOI:
10.3390/mi9090421
Date:
August, 2018
Файл:
PDF, 3.80 MB
2018